Kedu ihe bụ efere polishing alumina seramiiki wafer dị ọcha nke ukwuu?

Site na mmepe ngwa ngwa nke ụlọ ọrụ semiconductor, oke ụlọ ọrụ ahụ amụbaala ngwa ngwa, akụrụngwa mmepụta semiconductor anọgidewokwa na-agbanwe gaa na nkenke na mgbagwoju anya. Ebe ọ bụ na seramiiki nwere uru dị ka ike siri ike, modulus dị elu na-agbanwe agbanwe, iguzogide iyi dị elu, mkpuchi dị elu, iguzogide nchara, obere mgbasawanye, wdg, enwere ike iji ya dị ka akụkụ nke igwe silicon polishing, akụrụngwa ọgwụgwọ okpomọkụ epitaxial/oxidation/diffusion, igwe lithography, akụrụngwa deposition, ngwaọrụ etching semiconductor, igwe implantation ion na akụrụngwa ndị ọzọ, yabụ nyocha na mmepe na mmepụta nke akụkụ seramiiki ziri ezi na-emetụta mmepe nke ụlọ ọrụ semiconductor ozugbo. Ihe teknụzụ achọrọ maka nkwadebe ya na-abawanye elu.

Alumina dị ọcha nke ukwuu, 99.7%-99.9% alumina.
Ike igwe dị elu, oke nguzogide iyi, oke mkpuchi eletriki, oke nkwụsi ike kemịkalụ, ezigbo nguzogide okpomọkụ na nguzogide nchara. Ugbu a, ojiji nke seramiiki ịkpụ diski ígwè semiconductor silicon wafer bụ ụzọ kachasị mma na nke kachasị mma. A na-eji usoro ịkpụ akụkụ abụọ gwerie wafer silicon a gbuturu agbutu, a na-emekwa ka mma nke wafer ịkpụcha mma site na imeziwanye usoro ịkpụcha (ihe diski, mmiri ịkpụcha, nrụgide ịkpụcha na ọsọ ịkpụcha, wdg). Karịsịa, iji efere seramiiki kama efere ígwè a kpụrụ akpụ, iji zere ịkpụcha n'elu isi nke wafer nke ọnya ma ọ bụ mmetọ kpatara, belata ntinye nke ion ígwè, nwere ike ibelata nhazi silicon na-esote, belata oge usoro (corrosion) na-esote, melite arụmọrụ mmepụta, ma belata mfu nke nhazi silicon, melite ojiji nke silicon nke ukwuu.

Efere polishing alumina wafer dị eluA na-eji ya na semiconductor, petroleum, kemịkalụ, fotovoltaic, liquid kristal na ụlọ ọrụ ndị ọzọ, dịka akụkụ igwe, akụkụ eletrọnịkị, diski induction microwave, ihe mkpuchi na akụkụ ndị ọzọ, ngwaọrụ semiconductor, ngwa vacuum, akụrụngwa mmepụta kristal mmiri mmiri na akụkụ ndị ọzọ. Seramiki alumina buru ibu na ịdị ọcha dị elu nwere uru dị mkpa na ụlọ ọrụ sapphire na ụlọ ọrụ chip semiconductor. Ọ bụ ihe nkwado dị mkpa na ihe oriri maka polishing mechanical chemical (CMP) nke sapphire na semiconductor silicon wafers. Enwere ike iji seramiki alumina buru ibu na ịdị ọcha dị elu dị ka ihe ndabere alumina maka LCD.